The Resource CCD Image Sensors in Deep-Ultraviolet : Degradation Behavior and Damage Mechanisms, by Flora Li, Arokia Nathan, (electronic resource)

CCD Image Sensors in Deep-Ultraviolet : Degradation Behavior and Damage Mechanisms, by Flora Li, Arokia Nathan, (electronic resource)

Label
CCD Image Sensors in Deep-Ultraviolet : Degradation Behavior and Damage Mechanisms
Title
CCD Image Sensors in Deep-Ultraviolet
Title remainder
Degradation Behavior and Damage Mechanisms
Statement of responsibility
by Flora Li, Arokia Nathan
Creator
Contributor
Author
Author
Subject
Language
  • eng
  • eng
Summary
As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths
Member of
Is Subseries of
http://library.link/vocab/creatorName
Li, Flora
Dewey number
621.36/4
http://bibfra.me/vocab/relation/httpidlocgovvocabularyrelatorsaut
  • f1Clkr4YLdE
  • 3RjFOADIJ6A
Language note
English
LC call number
TA1750-1750.22
Literary form
non fiction
Nature of contents
dictionaries
http://library.link/vocab/relatedWorkOrContributorName
Nathan, Arokia.
Series statement
Microtechnology and MEMS,
http://library.link/vocab/subjectName
  • Optical materials
  • Engineering
  • Electronics
  • Optical and Electronic Materials
  • Optics, Lasers, Photonics, Optical Devices
  • Engineering, general
  • Electronics and Microelectronics, Instrumentation
Label
CCD Image Sensors in Deep-Ultraviolet : Degradation Behavior and Damage Mechanisms, by Flora Li, Arokia Nathan, (electronic resource)
Instantiates
Publication
Note
Description based upon print version of record
Carrier category
online resource
Carrier category code
  • cr
Content category
text
Content type code
  • txt
Contents
Overview of CCD -- CCD Imaging in the Ultraviolet (UV) Regime -- Silicon -- Silicon Dioxide -- Si-SiO2 Interface -- General Effects of Radiation -- Effects of Radiation on CCDs -- UV-Induced Effects in Si -- UV Laser Induced Effects in SiO2 -- UV Laser Induced Effects at the Si-SiO2 Interface -- CCD Measurements at 157nm -- Design Optimizations for Future Research -- Concluding Remarks
Dimensions
unknown
Edition
1st ed. 2005.
Extent
1 online resource (239 p.)
Form of item
online
Isbn
9786610360710
Media category
computer
Media type code
  • c
Other control number
10.1007/b139047
Specific material designation
remote
System control number
  • (CKB)1000000000231451
  • (EBL)304023
  • (OCoLC)209860313
  • (SSID)ssj0000768620
  • (PQKBManifestationID)12265698
  • (PQKBTitleCode)TC0000768620
  • (PQKBWorkID)10759739
  • (PQKB)11466080
  • (SSID)ssj0000291080
  • (PQKBManifestationID)11235672
  • (PQKBTitleCode)TC0000291080
  • (PQKBWorkID)10246833
  • (PQKB)11696808
  • (DE-He213)978-3-540-27412-4
  • (MiAaPQ)EBC304023
  • (EXLCZ)991000000000231451
Label
CCD Image Sensors in Deep-Ultraviolet : Degradation Behavior and Damage Mechanisms, by Flora Li, Arokia Nathan, (electronic resource)
Publication
Note
Description based upon print version of record
Carrier category
online resource
Carrier category code
  • cr
Content category
text
Content type code
  • txt
Contents
Overview of CCD -- CCD Imaging in the Ultraviolet (UV) Regime -- Silicon -- Silicon Dioxide -- Si-SiO2 Interface -- General Effects of Radiation -- Effects of Radiation on CCDs -- UV-Induced Effects in Si -- UV Laser Induced Effects in SiO2 -- UV Laser Induced Effects at the Si-SiO2 Interface -- CCD Measurements at 157nm -- Design Optimizations for Future Research -- Concluding Remarks
Dimensions
unknown
Edition
1st ed. 2005.
Extent
1 online resource (239 p.)
Form of item
online
Isbn
9786610360710
Media category
computer
Media type code
  • c
Other control number
10.1007/b139047
Specific material designation
remote
System control number
  • (CKB)1000000000231451
  • (EBL)304023
  • (OCoLC)209860313
  • (SSID)ssj0000768620
  • (PQKBManifestationID)12265698
  • (PQKBTitleCode)TC0000768620
  • (PQKBWorkID)10759739
  • (PQKB)11466080
  • (SSID)ssj0000291080
  • (PQKBManifestationID)11235672
  • (PQKBTitleCode)TC0000291080
  • (PQKBWorkID)10246833
  • (PQKB)11696808
  • (DE-He213)978-3-540-27412-4
  • (MiAaPQ)EBC304023
  • (EXLCZ)991000000000231451

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